Development of a High Resolution Interferometric System for Testing the Optical Elements in ELI

Development of a High Resolution Interferometric System for Testing the Optical Elements in ELI

The development and application of a phase shifting interferometric system for testing optical surfaces is described. Several application examples of this instrument for 3D surface topography diagnostics are presented. After certain expedient reconstruction the system can be used for testing the opt...

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Veröffentlicht in:Proceedings of the Conference of Light at Extreme Intensities 2009-10, Vol.1228, p.144-149
Hauptverfasser: Czitrovszky, Aladar, Kiss, Arpad, Nagy, Attila, Kerekes, Attila, Oszetzky, Daniel
Format: Artikel
Sprache:eng
Schlagworte:
Coatings
Diagnostic software
High resolution
Infrastructure
Reconstruction
Three dimensional
Topography
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Zusammenfassung:The development and application of a phase shifting interferometric system for testing optical surfaces is described. Several application examples of this instrument for 3D surface topography diagnostics are presented. After certain expedient reconstruction the system can be used for testing the optical elements and different coatings in ELI (Extreme Light Infrastructure).
ISSN:0094-243X