Characterization of Nano-Crystalline Diamond like Carbon (DLC) Films with Substrate Temperature Using Dense Plasma Focusing Method

Characterization of Nano-Crystalline Diamond like Carbon (DLC) Films with Substrate Temperature Using Dense Plasma Focusing Method

Nano-crystalline Diamond like Carbon (DLC) film has been grown by Dense Plasma Focusing Method (DPF) using pure graphite Plasma, on different substrate (glass/silica) at different substrate temperature. The films were grown at substrate temperature 100 degree C, 150 degree C & 300 degree C by th...

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Veröffentlicht in:Special Edition of the World Congress on Engineering and Computer Science 2009-10, Vol.1247, p.363-373
Hauptverfasser: Yadav, Vikram S, Sahu, Devendra K, Singh, Manveer, Kumar, Kuldeep, Dhubkarya, D C, Singh, Yashpal
Format: Artikel
Sprache:eng
Schlagworte:
Asymmetry
Dense plasmas
Diamond like carbon
Diamond-like carbon films
Focusing
Glass
Graphite
Nanocrystals
Raman spectra
Silica glass
Silicon dioxide
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Zusammenfassung:Nano-crystalline Diamond like Carbon (DLC) film has been grown by Dense Plasma Focusing Method (DPF) using pure graphite Plasma, on different substrate (glass/silica) at different substrate temperature. The films were grown at substrate temperature 100 degree C, 150 degree C & 300 degree C by the high dense plasma of energy 1.3 k Joule on glass and silica. Raman spectra confirmed that sp(3) content is grown in the films under various conditions. The Raman spectra of these films show a broad asymmetric peak which narrow with decreasing sp(2) contents. We believe that our data presented here may be used as reference of DLC characterization.
ISSN:0094-243X