Microrelief Measurements for White-Light Interferometer with Adaptive Algorithm Interferogram Processing

Microrelief Measurements for White-Light Interferometer with Adaptive Algorithm Interferogram Processing

The problem of reducing measurement errors of surface microrelief with nonuniform scattering properties using white-light interferometer was discussed. Adaptive algorithm of thresholding which allows us to set optimal threshold in every point of measuring surface was proposed. Application of this al...

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Veröffentlicht in:Key engineering materials 2010-01, Vol.437, p.35-39
Hauptverfasser: Kulikov, Rodion V., Sysoev, Evgeny V.
Format: Artikel
Sprache:eng
Schlagworte:
Adaptive algorithms
Algorithms
Error analysis
Interference
Interferometers
Nonuniform
Optimization
Permissible error
Scanning
Scattering
Thresholds
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Zusammenfassung:The problem of reducing measurement errors of surface microrelief with nonuniform scattering properties using white-light interferometer was discussed. Adaptive algorithm of thresholding which allows us to set optimal threshold in every point of measuring surface was proposed. Application of this algorithm of threshold choice allows increasing dynamical range of interference detection more than in 10 times. The dependences of scanning interferometer resolution on differentional interferogram thresholding have been discussed.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.437.35