Two-wavelength double heterodyne interferometry using a matched grating technique
Two-wavelength double heterodyne interferometry is applied for topographic measurements on optically rough target surfaces. A two-wavelength He-Ne laser and a matched grating technique are used to improve system stability and to simplify heterodyne frequency generation.
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Veröffentlicht in: | Applied Optics 1991-08, Vol.30 (22), p.3139-3144 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Two-wavelength double heterodyne interferometry is applied for topographic measurements on optically rough target surfaces. A two-wavelength He-Ne laser and a matched grating technique are used to improve system stability and to simplify heterodyne frequency generation. |
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ISSN: | 0003-6935 1559-128X 1539-4522 |
DOI: | 10.1364/AO.30.003139 |