Two-wavelength double heterodyne interferometry using a matched grating technique

Two-wavelength double heterodyne interferometry is applied for topographic measurements on optically rough target surfaces. A two-wavelength He-Ne laser and a matched grating technique are used to improve system stability and to simplify heterodyne frequency generation.

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Veröffentlicht in:Applied Optics 1991-08, Vol.30 (22), p.3139-3144
Hauptverfasser: SODNIK, Z, FISCHER, E, ITTNER, T, TIZIANI, H. J
Format: Artikel
Sprache:eng
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Zusammenfassung:Two-wavelength double heterodyne interferometry is applied for topographic measurements on optically rough target surfaces. A two-wavelength He-Ne laser and a matched grating technique are used to improve system stability and to simplify heterodyne frequency generation.
ISSN:0003-6935
1559-128X
1539-4522
DOI:10.1364/AO.30.003139