Cantilever technique for the preparation of cross sections for transmission electron microscopy using a focused ion beam workstation

A new method for the preparation of cross sections for transmission electron microscopy using a focused ion beam workstation is presented. The new technique consists of micromachining a freestanding cantilever into which a membrane for transmission electron microscopy is milled. An advantage of this approach over the trench and lift out focused ion beam procedures for the preparation of cross sections for transmission electron microscopy is that the resulting cross sections can be both tilted through large angles (+45°) without the electron path becoming obstructed and they can be returned to the focused ion beam system for further thinning.