The mechanics of an oscillatory rate gyroscope with piezoelectric film actuation and sensing

Abstract Many applications exist for low-cost, miniature rate gyroscopes. These are primarily in the automotive field, and relate to safety systems or vehicle navigation. This paper presents an analysis of the mechanics of an oscillatory rate gyroscope that is actuated and sensed using thin-film lead-zirconate-titanate (PZT), and is suitable for manufacture using recently developed micromachining techniques. An analytical model of the device, combining the electromechanical behaviour of PZT and the dynamic behaviour of the mechanical structure, has been developed. This model is used to investigate the basic performance of a gyro of realistic dimensions, thus demonstrating the potential feasibility of such a device.