Intercomparison of scanning probe microscopes

Intercomparison of scanning probe microscopes

Comparison measurements on reference standards are reported in which 13 partners with different instruments took part. A set of prototype standards which had been produced and calibrated within a European project were used for the measurements. Here, results of measurements on a 240 nm step height s...

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Veröffentlicht in:Precision engineering 2002-07, Vol.26 (3), p.296-305
Hauptverfasser: Breil, R, Fries, T, Garnaes, J, Haycocks, J, Hüser, D, Joergensen, J, Kautek, W, Koenders, L, Kofod, N, Koops, K.R, Korntner, R, Lindner, B, Mirandé, W, Neubauer, A, Peltonen, J, Picotto, G.B, Pisani, M, Rothe, H, Sahre, M, Stedman, M, Wilkening, G
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Calibration
Calibration artifacts
Comparison measurements
Exact sciences and technology
Industrial metrology. Testing
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Optical microscopy
Physics
Probes
Quantitative microscopy
Scanning probe microscopes, components and techniques
Scanning probe microscopy
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Beschreibung
Zusammenfassung:Comparison measurements on reference standards are reported in which 13 partners with different instruments took part. A set of prototype standards which had been produced and calibrated within a European project were used for the measurements. Here, results of measurements on a 240 nm step height standard and a two-dimensional lateral standard with a nominal pitch of 1 μm are reported.
ISSN:0141-6359
1873-2372
DOI:10.1016/S0141-6359(02)00114-9