Synergism of transmission measurements with spectroscopic ellipsometry measurements in the analysis of a nearly opaque bimetal film stack on glass

Synergism of transmission measurements with spectroscopic ellipsometry measurements in the analysis of a nearly opaque bimetal film stack on glass

For a bimetal stack (Pt) and (Au) which is nearly opaque, we used transmission measurements along with spectroscopic ellipsometry measurements to determine the thicknesses of each metal layer as well as the optical constants of both materials. The key role of the transmission measurements is discuss...

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Veröffentlicht in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2000-05, Vol.18 (3), p.946-950
Hauptverfasser: Tompkins, Harland G., Tasic, Sonja
Format: Artikel
Sprache:eng
Schlagworte:
Ellipsometry
Glass
Gold
Light measurement
Light transmission
Metallic superlattices
Opacity
Platinum
Spectroscopic analysis
Thickness measurement
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Beschreibung
Zusammenfassung:For a bimetal stack (Pt) and (Au) which is nearly opaque, we used transmission measurements along with spectroscopic ellipsometry measurements to determine the thicknesses of each metal layer as well as the optical constants of both materials. The key role of the transmission measurements is discussed.
ISSN:0734-2101
1520-8559
DOI:10.1116/1.582280