AFM fabrication and characterization of nanoscale Al2O3 patterns

In this paper the atomic force microscopy (AFM) fabrication of nanoscale Al 2 O 3 patterns were studied. Nanowire, rings, dot array and pattern were fabricated on Si substrates with SiO 2 surface layer. The effects of applied voltage and scanning speed on obtained Al 2 O 3 pattern were evaluated and...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Journal of materials science. Materials in electronics 2009-02, Vol.20 (2), p.177-180
Hauptverfasser:	Jiao, Zheng, Zhang, Haijiao, Wu, Minghong, Guo, Huijiao, Wang, Jia, Zhao, Bing, Ding, Guoji
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Atoms & subatomic particles Characterization and Evaluation of Materials Chemistry and Materials Science Cross-disciplinary physics: materials science rheology Electronics Exact sciences and technology Materials Materials Science Nanoscale materials and structures: fabrication and characterization Optical and Electronic Materials Physics Quantum wires
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	In this paper the atomic force microscopy (AFM) fabrication of nanoscale Al 2 O 3 patterns were studied. Nanowire, rings, dot array and pattern were fabricated on Si substrates with SiO 2 surface layer. The effects of applied voltage and scanning speed on obtained Al 2 O 3 pattern were evaluated and the anodic oxidation mechanism was discussed.
ISSN:	0957-4522 1573-482X
DOI:	10.1007/s10854-008-9678-1