Novel Highly Resistive Passivating AuAgO(x) Thin Films
Thin AuAgO(x) films with prolonged lifetimes (up to 1(1/2) years) were produced by reactive sputtering in a magnetron allowing a smooth variation of the degree of ion assistance by an external solenoid. The film specific electric resistivity and the film lifetimes were found to be single power funct...
Gespeichert in:
| Veröffentlicht in: | Organized by the Hellenic Physical Society with Cooperation of the Physics Departments of Universities in Greece 2009-09, Vol.1203, p.667-671 |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | Thin AuAgO(x) films with prolonged lifetimes (up to 1(1/2) years) were produced by reactive sputtering in a magnetron allowing a smooth variation of the degree of ion assistance by an external solenoid. The film specific electric resistivity and the film lifetimes were found to be single power functions of a combined parameter representing a product of solenoid current and oxygen gas pressure divided by magnetron discharge power. |
|---|---|
| ISSN: | 0094-243X |