ZnO TFT Devices Built on Glass Substrates

ZnO thin-film transistors (TFTs) were built on glass substrates. The device with a top gate configuration operates in the depletion mode. The ZnO channel was grown by metalorganic chemical vapor deposition (MOCVD) on glass at low temperature. SiO 2 was used as the gate dielectric. The TFT has an on/...

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Veröffentlicht in:	Journal of electronic materials 2008-09, Vol.37 (9), p.1237-1240
Hauptverfasser:	Zhu, J., Chen, H., Saraf, G., Duan, Z., Lu, Y., Hsu, S.T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Characterization and Evaluation of Materials Chemical compounds Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Chemistry and Materials Science Cross-disciplinary physics: materials science rheology Electronics Electronics and Microelectronics Exact sciences and technology Glass substrates Instrumentation Materials Science Methods of deposition of films and coatings film growth and epitaxy Microelectronic fabrication (materials and surfaces technology) Optical and Electronic Materials Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Semiconductors Solid State Physics Thin films Transistors
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Beschreibung
Zusammenfassung:	ZnO thin-film transistors (TFTs) were built on glass substrates. The device with a top gate configuration operates in the depletion mode. The ZnO channel was grown by metalorganic chemical vapor deposition (MOCVD) on glass at low temperature. SiO 2 was used as the gate dielectric. The TFT has an on/off ratio of ∼4.0 × 10 4 and a channel field-effect mobility of ∼4.0 cm 2 /V s. The average transmittance of the ZnO film in the visible wavelength is ∼80%. To compare the characteristics of the TFTs prepared by using a poly-ZnO and epitaxial-ZnO channel, an epi-ZnO TFT with the same configuration and dimensions was made on an r-Al 2 O 3 substrate. The epi-ZnO TFT shows higher field-effect mobility of ∼35 cm 2 /V s and on/off ratio of ∼10 8 .
ISSN:	0361-5235 1543-186X
DOI:	10.1007/s11664-008-0457-9