Experimental evaluation of a spherical aberration-corrected TEM and STEM

Experimental evaluation of a spherical aberration-corrected TEM and STEM

We have successfully developed a spherical aberration (Cs)-corrected electron microscope for probe- and image-forming systems using hexapole correctors. The performance of the microscope has been evaluated experimentally. The point resolution attained using the image-forming Cs-corrector is better t...

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Veröffentlicht in:Journal of electron microscopy 2005-04, Vol.54 (2), p.119-121
Hauptverfasser: Sawada, Hidetaka, Tomita, Takeshi, Naruse, Mikio, Honda, Toshikazu, Hambridge, Paul, Hartel, Peter, Haider, Maximilian, Hetherington, Crispin, Doole, Ron, Kirkland, Angus, Hutchison, John, Titchmarsh, John, Cockayne, David
Format: Artikel
Sprache:eng
Schlagworte:
hexapole corrector
high resolution
spherical aberration
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Beschreibung
Zusammenfassung:We have successfully developed a spherical aberration (Cs)-corrected electron microscope for probe- and image-forming systems using hexapole correctors. The performance of the microscope has been evaluated experimentally. The point resolution attained using the image-forming Cs-corrector is better than 0.12 nm. For scanning transmission electron microscopy, the Ronchigram flat area was >40 mrad in half-angle using the probe-forming Cs-corrector.
ISSN:0022-0744
2050-5698
1477-9986
2050-5701
DOI:10.1093/jmicro/dfi001