The Best Materials for Tiny, Clever Sensors

The Best Materials for Tiny, Clever Sensors

Many of today's tiniest sensors are built with microsystems technology, a set of design and production tools that uses techniques similar to integrated circuit production to make micrometer-scale mechanical structures. Since the 1970s, researchers have aimed to create smarter sensors and transd...

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Veröffentlicht in:Science (American Association for the Advancement of Science) 2004-11, Vol.306 (5698), p.986-987
Hauptverfasser: Van Hoof, Chris, Baert, Kris, Witvrouw, Ann
Format: Artikel
Sprache:eng
Schlagworte:
Climate
Design and construction
Innovations
Integrated circuits
Materials
Perspectives
Physics
Sensors
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Zusammenfassung:Many of today's tiniest sensors are built with microsystems technology, a set of design and production tools that uses techniques similar to integrated circuit production to make micrometer-scale mechanical structures. Since the 1970s, researchers have aimed to create smarter sensors and transducers--in which data are gathered and interpreted within the sensor or transducer--using this technology. Here, Hoof et al discuss the best materials for tiny, clever sensors.
ISSN:0036-8075
1095-9203
DOI:10.1126/science.1100080