Surface structure of plasma-etched (211)B HgCdTe

Surface structure of plasma-etched (211)B HgCdTe

The surface of (211)B HgCdTe has been studied by reflection high-energy electron diffraction (RHEED) and atomic force microscopy (AFM). RHEED analysis of the as-grown Hg-rich molecular beam epitaxy (MBE) (211)B HgCdTe suggests the surface reconstructs by additional Hg incorporation. The plasma-etche...

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Veröffentlicht in:Journal of electronic materials 2005-06, Vol.34 (6), p.726-732
Hauptverfasser: BENSON, J. D, STOLTZ, A. J, DINAN, J. H, VARESI, J. B, ALMEIDA, L. A, SMITH, E. P. G, JOHNSON, S. M, MARTINKA, M, KALECZYC, A. W, MARKUNAS, J. K, BOYD, P. R
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Arrays
Diffraction
Electronics
Exact sciences and technology
Materials
Mercury cadmium telluride
Molecular beam epitaxy
Plasma etching
Sensors
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Zusammenfassung:The surface of (211)B HgCdTe has been studied by reflection high-energy electron diffraction (RHEED) and atomic force microscopy (AFM). RHEED analysis of the as-grown Hg-rich molecular beam epitaxy (MBE) (211)B HgCdTe suggests the surface reconstructs by additional Hg incorporation. The plasma-etched (211)B HgCdTe surface is crystalline but stepped and facetted. RHEED analysis indicates asymmetric pyramids (base dimensions [asymptotically =] 0.5 × 1.1 nm) are formed to minimize surface Hg concentration. The AFM examination of plasma-etched (211)B HgCdTe reveals oriented mesoscopic features. [PUBLICATION ABSTRACT]
ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-005-0011-y