Research on Quantum State in Fabricating Poly-Si Films

Amorphous silicon films prepared by PECVD on glass substrate have been crystallized by rapid thermal annealing (RTA). By means of micro-Raman scattering and scanning electronic microscope (SEM), the quantum states in these processions are found and discussed.

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Bibliographische Detailangaben
Veröffentlicht in:	Key engineering materials 2010-01, Vol.428-429, p.540-543
Hauptverfasser:	Guo, Xin Feng, Lu, Jing Xiao, Chen, Lan Li, Luo, Peng Hui, Jin, Rui Min
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Amorphous silicon films prepared by PECVD on glass substrate have been crystallized by rapid thermal annealing (RTA). By means of micro-Raman scattering and scanning electronic microscope (SEM), the quantum states in these processions are found and discussed.
ISSN:	1013-9826 1662-9795 1662-9795
DOI:	10.4028/www.scientific.net/KEM.428-429.540