Rapid thermal processing for silicon nanoelectronics applications

The result of an RTA temperature cycle for a particular process is quantified in terms of the concept of thermal budget. For example, if the process under consideration is solid-phase diffusion, then the thermal budget may be specified as the thermal-diffusion distance. If the diffusion is determined by a single thermally activated mechanism, then fixing the thermal budget allows one to use a combination of RTA cycle times and temperatures that are interrelated by an Arrhenius function.