Growth of Fully Doped Hgsub 1-xCdsub x exp e Heterostructures Using a Novel Iodine Doping Source to Achieve Improved Device Performance at Elevated Temperatures

Band gap engineered Hgsub 1-xCdsub x exp e (MCT) heterostructures should lead to detectors with improved electro-optic and radiometric performance at elevated operating temperatures. Growth of such structures was accomplished using metalorganic vapor phase epitaxy (MOVPE). Acceptor doping with arsen...

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Veröffentlicht in:Journal of electronic materials 1996-08, Vol.25 (8), p.1276-1285
Hauptverfasser: Maxey, C D, Jones, C L, Metcalfe, N E, Catchpole, R
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Sprache:eng
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Zusammenfassung:Band gap engineered Hgsub 1-xCdsub x exp e (MCT) heterostructures should lead to detectors with improved electro-optic and radiometric performance at elevated operating temperatures. Growth of such structures was accomplished using metalorganic vapor phase epitaxy (MOVPE). Acceptor doping with arsenic (As), using phenylarsine (PhAsHsub 2), demonstrated 100% activation and reproducible control over a wide range of concentrations (1 10sup 15 to 3.5 10sup 17 cmsup -3). Although vapor from elemental iodine showed the suitability of iodine as a donor in MCT, problems arose while controlling low donor concentrations. Initial studies using ethyliodide (EtI) demonstrated that this source could be used successfully to dope MCT, yielding the properties required for stable heterostructure devices, i.e. [approximate]100% activation, no memory problems and low diffusion coefficient. Cryogenic alkyl cooling or very high dilution factors were required to achieve the concentrations needed for donor doping below [approximate]10sup 16 cmsup -3 due to the high vapor pressure of the alkyl. A study of an alternative organic iodide source, 2-methylpropyliodide (2 MePrI), which has a much lower vapor pressure, improved control of low donor concentrations. 2 MePrI demonstrated the same donor source suitability as EtI and was used to control iodine concentrations from [approximate] 1 10sup 15 to 5 10sup 17 cmsup -3. The iodine from both sources only incorporated during the CdTe cycles of the interdiffused multilayer process (IMP) in a similar manner to both elemental iodine and As from PhAsHsub 2. High resolution secondary ion mass spectroscopy analysis showed that IMP scale modulations can still be identified after growth. The magnitude of these oscillations is consistent with a diffusion coefficient of [approximate]7 10sup -16cmsup 2ssup -1 for iodine in MCT at 365'C. Extrinsically doped device heterostructures, grown using 2 MePrI, have been intended to operate at elevated temperatures either for long wavelength (8-12 km) equilibrium operation at 145K or nonequilibrium operation at 190 and 295K in both the 3-5 km and 8-12 km wavelength ranges. Characterization of such device structures will be discussed. Linear arrays of mesa devices have been fabricated in these layers. Medium wave nonequilibrium device structures have demonstrated high quantum efficiencies and Rsub 0 = 37 ohmcmsup 2 for sub co = 4.9 km at 190K. [PUBLICATION ABSTRACT]
ISSN:0361-5235