Effect of humidity treatments on porosity and mechanical integrity of mesoporous silica films

Effect of humidity treatments on porosity and mechanical integrity of mesoporous silica films

The beneficial effects humidity treatments have on molecularly templated mesoporous silica films with respect to elastic modulus, with minimal detrimental effects on porosity and dielectric constant, were identified.

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Chemical Communications 2003-01, Vol.16 (16), p.2054-2055
Hauptverfasser: Li, Xiaohong, Birnbaum, Jerome C, Williford, Rick E, Fryxell, Glen E, Coyle, Chris A, Dunham, Glen C, Baskaran, Suresh
Format: Artikel
Sprache:eng
Schlagworte:
CERAMICS
DIELECTRIC MATERIALS
ENVIRONMENTAL MOLECULAR SCIENCES LABORATORY, NULL
HUMIDITY
IMPURITIES
INTEGRATED CIRCUITS
MATERIALS SCIENCE
PERMITTIVITY
POROSITY
SILICA
SILICATES
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The beneficial effects humidity treatments have on molecularly templated mesoporous silica films with respect to elastic modulus, with minimal detrimental effects on porosity and dielectric constant, were identified.
ISSN:1359-7345
1364-548X
DOI:10.1039/b304843h