Templating of Silsesquioxane Cross-Linking Using Unimolecular Self-Organizing Polymers
Nanopores created by micellar star polymers in amorphous organic silsequioxane thermosets produce morphologically controlled porous materials for semiconductor chip applications (see picture). Pore size is independent of concentration and processing conditions, but depends solely on the size of the...
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Veröffentlicht in: | Angewandte Chemie International Edition 2003-08, Vol.42 (32), p.3785-3788 |
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Hauptverfasser: | , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Nanopores created by micellar star polymers in amorphous organic silsequioxane thermosets produce morphologically controlled porous materials for semiconductor chip applications (see picture). Pore size is independent of concentration and processing conditions, but depends solely on the size of the polymer molecule. |
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ISSN: | 1433-7851 1521-3773 |
DOI: | 10.1002/anie.200350930 |