Templating of Silsesquioxane Cross-Linking Using Unimolecular Self-Organizing Polymers

Nanopores created by micellar star polymers in amorphous organic silsequioxane thermosets produce morphologically controlled porous materials for semiconductor chip applications (see picture). Pore size is independent of concentration and processing conditions, but depends solely on the size of the...

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Veröffentlicht in:Angewandte Chemie International Edition 2003-08, Vol.42 (32), p.3785-3788
Hauptverfasser: Connor, Eric F., Sundberg, Linda K., Kim, Ho-Cheol, Cornelissen, Jeroen J., Magbitang, Teddie, Rice, Phil M., Lee, Victor Y., Hawker, Craig J., Volksen, Willi, Hedrick, James L., Miller, Robert D.
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Sprache:eng
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Zusammenfassung:Nanopores created by micellar star polymers in amorphous organic silsequioxane thermosets produce morphologically controlled porous materials for semiconductor chip applications (see picture). Pore size is independent of concentration and processing conditions, but depends solely on the size of the polymer molecule.
ISSN:1433-7851
1521-3773
DOI:10.1002/anie.200350930