Fringe modulation skewing effect in white-light vertical scanning interferometry
An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is...
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| Veröffentlicht in: | Applied Optics 2000-05, Vol.39 (13), p.2101-2106 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain the effect. |
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| ISSN: | 1559-128X 0003-6935 1539-4522 |
| DOI: | 10.1364/AO.39.002101 |