Offset of coherent envelope position due to phase change on reflection

Different materials with different phase changes on reflection affect the surface-height measurement when interferometric techniques are employed for testing objects constructed of different materials that are adjacent to one another. We test the influence of this phase change on reflection when ver...

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Veröffentlicht in:Applied Optics 2001-05, Vol.40 (13), p.2102-2106
Hauptverfasser: Harasaki, A, Schmit, J, Wyant, J C
Format: Artikel
Sprache:eng
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Zusammenfassung:Different materials with different phase changes on reflection affect the surface-height measurement when interferometric techniques are employed for testing objects constructed of different materials that are adjacent to one another. We test the influence of this phase change on reflection when vertical scanning interferometry with a broadband source is used. We show theoretically and experimentally that the strong linear dependence of the dispersion of the phase change on reflection preserves the shape of the coherence envelope of the fringes but shifts it along the optical axis by approximately 10-40 nm for metallic surfaces.
ISSN:1559-128X
0003-6935
1539-4522
DOI:10.1364/AO.40.002102