Rapid scanning microscope for light probing and infrared mapping

A rapid scanning microscope has been designed and used to light-probe the response of semiconductor devices and to observe their infrared emission and transmission. The heart of this system is a single mirror that vibrates on two perpendicular axes to deflect a light beam into a raster pattern. The single mirror scanner is relatively easy to construct, can be used with standard microscope components, and yet allows for useful wide angle deflections and a large field of view.