Axicon-type test interferometer for cylindrical surfaces: systematic error assessment

The principle and the alignment aberration functions are described for an axicon-type test interferometer for measuring cylindrical mantle surfaces. Additionally, we show that the derived systematic alignment functions fulfill for reasonably small misalignments the requirements for measurements in t...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Applied Optics 1997-05, Vol.36 (13), p.2791-2795
Hauptverfasser: Lindlein, N, Schreiner, R, Brinkmann, S, Dresel, T, Schwider, J
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The principle and the alignment aberration functions are described for an axicon-type test interferometer for measuring cylindrical mantle surfaces. Additionally, we show that the derived systematic alignment functions fulfill for reasonably small misalignments the requirements for measurements in the range of approximately 1/100 of a fringe. We verify this with optical path-length calculations, using ray tracing.
ISSN:1559-128X
0003-6935
1539-4522
DOI:10.1364/AO.36.002791