Multiple analysis of an unknown optical multilayer coating

Results are given of the analysis at five different laboratories of an unknown optical multilayer coating. Eleven different analytical and laboratory techniques were applied to the problem: Auger electron spectroscopy, energy dispersive X-ray analysis, ion beam spectrochemical analysis, Rutherford b...

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Veröffentlicht in:	Applied Optics 1985-08, Vol.24 (16), p.2625-2646, Article 2625
Hauptverfasser:	BARTELLA, J, BERNING, P. H, JACOBSON, M. R, KLINGER, R. E, LEAVITT, J. A, LOTZ, H.-G, MACLEOD, H. A, MESSERLY, M. J, MITCHELL, D. F, MUENZ, W.-D, NEBESNY, K. W, PFEFFERKOM, R, BOVARD, B, SAXE, S. G, SONG, D. Y, SWENSON, R. M, SWAB, P, THOENI, W, VAN MILLIGEN, F, CARNIGLIA, C. K, CASPARIS, E, COSTICH, V. R, DOBROWOLSKI, J. A, GIBSON, U. J, HERRMANN, R, HO, F. C
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Fundamental areas of phenomenology (including applications) Lenses, prisms, and mirrors Optical elements, devices, and systems Optics Physics
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Beschreibung
Zusammenfassung:	Results are given of the analysis at five different laboratories of an unknown optical multilayer coating. Eleven different analytical and laboratory techniques were applied to the problem: Auger electron spectroscopy, energy dispersive X-ray analysis, ion beam spectrochemical analysis, Rutherford backscattering, reverse optical monitoring, secondary ion mass spectroscopy, stylus profilometer, spectrophotometric analysis, transmission electron microscopy, ultramicrotomy, and X-ray photoelectron spectroscopy. The multilayer nominally consisted of three dielectric and two metallic layers. It was demonstrated convincingly that with present day techniques it is possible to determine the basic structure of such a coating.
ISSN:	0003-6935 1559-128X 1539-4522
DOI:	10.1364/AO.24.002625