Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements

The constants depend on structure. A technique, based on transmission measurements carried out in vacuo, derives profiles of the refractive index and extinction coeff. Monitoring of variations of the optical constants with changes in deposition parameters also uses this technique.

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Bibliographische Detailangaben
Veröffentlicht in:	Applied Optics 1985-06, Vol.24 (12), p.1803-1807
Hauptverfasser:	BOVARD, B, VAN MILLIGEN, F. J, MESSERLY, M. J, SAXE, S. G, MACLEOD, H. A
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Infrared, submillimeter wave, microwave and radiowave instruments, equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	The constants depend on structure. A technique, based on transmission measurements carried out in vacuo, derives profiles of the refractive index and extinction coeff. Monitoring of variations of the optical constants with changes in deposition parameters also uses this technique.
ISSN:	0003-6935 1559-128X 1539-4522
DOI:	10.1364/ao.24.001803