Formation of Compositionally Abrupt Axial Heterojunctions in Silicon-Germanium Nanowires

We have formed compositionally abrupt interfaces in silicon-germanium (Si-Ge) and Si-SiGe heterostructure nanowires by using solid aluminum-gold alloy catalyst particles rather than the conventional liquid semiconductor-metal eutectic droplets. We demonstrated single interfaces that are defect-free...

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Veröffentlicht in:Science (American Association for the Advancement of Science) 2009-11, Vol.326 (5957), p.1247-1250
Hauptverfasser: Wen, C.-Y, Reuter, M.C, Bruley, J, Tersoff, J, Kodambaka, S, Stach, E.A, Ross, F.M
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Sprache:eng
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Zusammenfassung:We have formed compositionally abrupt interfaces in silicon-germanium (Si-Ge) and Si-SiGe heterostructure nanowires by using solid aluminum-gold alloy catalyst particles rather than the conventional liquid semiconductor-metal eutectic droplets. We demonstrated single interfaces that are defect-free and close to atomically abrupt, as well as quantum dots (i.e., Ge layers tens of atomic planes thick) embedded within Si wires. Real-time imaging of growth kinetics reveals that a low solubility of Si and Ge in the solid particle accounts for the interfacial abruptness. Solid catalysts that can form functional group IV nanowire-based structures may yield an extended range of electronic applications.
ISSN:0036-8075
1095-9203
DOI:10.1126/science.1178606