Diode-laser-based high-precision absolute distance interferometer of 20 m range

We present a hybrid absolute distance measurement method that is based on a combination of frequency sweeping, variable synthetic, and two-wavelength, fixed synthetic wavelength interferometry. Both experiments were realized by two external cavity diode lasers. The measurement uncertainty was experi...

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Veröffentlicht in:Applied Optics 2009-11, Vol.48 (32), p.6188-6194
Hauptverfasser: Pollinger, Florian, Meiners-Hagen, Karl, Wedde, Martin, Abou-Zeid, Ahmed
Format: Artikel
Sprache:eng
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Zusammenfassung:We present a hybrid absolute distance measurement method that is based on a combination of frequency sweeping, variable synthetic, and two-wavelength, fixed synthetic wavelength interferometry. Both experiments were realized by two external cavity diode lasers. The measurement uncertainty was experimentally and theoretically demonstrated to be smaller than 12 microm at a measurement distance of 20 m.
ISSN:0003-6935
2155-3165
1539-4522
DOI:10.1364/ao.48.006188