Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser
We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels...
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| Veröffentlicht in: | Optics letters 2010-02, Vol.35 (3), p.282-284 |
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| container_end_page | 284 |
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| container_issue | 3 |
| container_start_page | 282 |
| container_title | Optics letters |
| container_volume | 35 |
| creator | He, Fei Cheng, Ya Xu, Zhizhan Liao, Yang Xu, Jian Sun, Haiyi Wang, Chen Zhou, Zenghui Sugioka, Koji Midorikawa, Katsumi Xu, Yonghao Chen, Xianfeng |
| description | We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized. |
| doi_str_mv | 10.1364/OL.35.000282 |
| format | Article |
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In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.</description><subject>Equipment Design</subject><subject>Glass</subject><subject>Lasers</subject><subject>Materials Testing</subject><subject>Microfluidic Analytical Techniques - instrumentation</subject><subject>Microfluidic Analytical Techniques - methods</subject><subject>Microfluidics</subject><subject>Microscopy, Electron, Scanning - methods</subject><subject>Optics and Photonics</subject><subject>Silicon Dioxide - chemistry</subject><subject>Ultrasonics</subject><issn>0146-9592</issn><issn>1539-4794</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><sourceid>EIF</sourceid><recordid>eNo9kDtPwzAURi0EoqWwMSNvLKT4EcfxiMpTitQFZsuxr1tXSVziZODfE2hhunc4OtL5ELqmZEl5kd-vqyUXS0IIK9kJmlPBVZZLlZ-iOaF5kSmh2AxdpLSbmEJyfo5mjFAmCiXmaPcYerAD9qbugzVDiB2OHm9jGzfQQRwTboPto2_G4ILFdmu6DpqEoa3BOXA4dNiPaXpSaCYDHlPoNthgD-0QE9jYOdyYBP0lOvOmSXB1vAv08fz0vnrNqvXL2-qhyixnashKkVMA6a2UghTeEKM4N4wwT2tJalCFdIyV1siSEpK7kpfemdwIphx3zvEFuj149338HCENug3JQtOY3x4teU6m-lJO5N2BnAJT6sHrfR9a039pSvTPuHpdaS70YdwJvzmKx7oF9w__rcm_ARejdeA</recordid><startdate>20100201</startdate><enddate>20100201</enddate><creator>He, Fei</creator><creator>Cheng, Ya</creator><creator>Xu, Zhizhan</creator><creator>Liao, Yang</creator><creator>Xu, Jian</creator><creator>Sun, Haiyi</creator><creator>Wang, Chen</creator><creator>Zhou, Zenghui</creator><creator>Sugioka, Koji</creator><creator>Midorikawa, Katsumi</creator><creator>Xu, Yonghao</creator><creator>Chen, Xianfeng</creator><scope>CGR</scope><scope>CUY</scope><scope>CVF</scope><scope>ECM</scope><scope>EIF</scope><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope></search><sort><creationdate>20100201</creationdate><title>Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser</title><author>He, Fei ; Cheng, Ya ; Xu, Zhizhan ; Liao, Yang ; Xu, Jian ; Sun, Haiyi ; Wang, Chen ; Zhou, Zenghui ; Sugioka, Koji ; Midorikawa, Katsumi ; Xu, Yonghao ; Chen, Xianfeng</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c329t-8541ee7fc77506fa0a933a202f1b70be967d228ca781004d838fda4a529d3ddd3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Equipment Design</topic><topic>Glass</topic><topic>Lasers</topic><topic>Materials Testing</topic><topic>Microfluidic Analytical Techniques - instrumentation</topic><topic>Microfluidic Analytical Techniques - methods</topic><topic>Microfluidics</topic><topic>Microscopy, Electron, Scanning - methods</topic><topic>Optics and Photonics</topic><topic>Silicon Dioxide - chemistry</topic><topic>Ultrasonics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>He, Fei</creatorcontrib><creatorcontrib>Cheng, Ya</creatorcontrib><creatorcontrib>Xu, Zhizhan</creatorcontrib><creatorcontrib>Liao, Yang</creatorcontrib><creatorcontrib>Xu, Jian</creatorcontrib><creatorcontrib>Sun, Haiyi</creatorcontrib><creatorcontrib>Wang, Chen</creatorcontrib><creatorcontrib>Zhou, Zenghui</creatorcontrib><creatorcontrib>Sugioka, Koji</creatorcontrib><creatorcontrib>Midorikawa, Katsumi</creatorcontrib><creatorcontrib>Xu, Yonghao</creatorcontrib><creatorcontrib>Chen, Xianfeng</creatorcontrib><collection>Medline</collection><collection>MEDLINE</collection><collection>MEDLINE (Ovid)</collection><collection>MEDLINE</collection><collection>MEDLINE</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><jtitle>Optics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>He, Fei</au><au>Cheng, Ya</au><au>Xu, Zhizhan</au><au>Liao, Yang</au><au>Xu, Jian</au><au>Sun, Haiyi</au><au>Wang, Chen</au><au>Zhou, Zenghui</au><au>Sugioka, Koji</au><au>Midorikawa, Katsumi</au><au>Xu, Yonghao</au><au>Chen, Xianfeng</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser</atitle><jtitle>Optics letters</jtitle><addtitle>Opt Lett</addtitle><date>2010-02-01</date><risdate>2010</risdate><volume>35</volume><issue>3</issue><spage>282</spage><epage>284</epage><pages>282-284</pages><issn>0146-9592</issn><eissn>1539-4794</eissn><abstract>We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. 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| fulltext | fulltext |
| identifier | ISSN: 0146-9592 |
| ispartof | Optics letters, 2010-02, Vol.35 (3), p.282-284 |
| issn | 0146-9592 1539-4794 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_734025687 |
| source | MEDLINE; Optica Publishing Group Journals |
| subjects | Equipment Design Glass Lasers Materials Testing Microfluidic Analytical Techniques - instrumentation Microfluidic Analytical Techniques - methods Microfluidics Microscopy, Electron, Scanning - methods Optics and Photonics Silicon Dioxide - chemistry Ultrasonics |
| title | Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser |
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