Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser

We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels...

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Veröffentlicht in:	Optics letters 2010-02, Vol.35 (3), p.282-284
Hauptverfasser:	He, Fei, Cheng, Ya, Xu, Zhizhan, Liao, Yang, Xu, Jian, Sun, Haiyi, Wang, Chen, Zhou, Zenghui, Sugioka, Koji, Midorikawa, Katsumi, Xu, Yonghao, Chen, Xianfeng
Format:	Artikel
Sprache:	eng
Schlagworte:	Equipment Design Glass Lasers Materials Testing Microfluidic Analytical Techniques - instrumentation Microfluidic Analytical Techniques - methods Microfluidics Microscopy, Electron, Scanning - methods Optics and Photonics Silicon Dioxide - chemistry Ultrasonics
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.
ISSN:	0146-9592 1539-4794
DOI:	10.1364/ol.35.000282