Calibration of AFM cantilever spring constants

In this paper we present two simple, reliable and readily applicable methods for calibrating cantilevers and measuring the thickness of thin gold films. The spring constant calibration requires knowledge of the Young's modulus, density of the cantilever and resonant frequency. The thickness of...

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Veröffentlicht in:Ultramicroscopy 2003-10, Vol.97 (1), p.113-118
Hauptverfasser: Gibson, Christopher T., Weeks, Brandon L., Abell, Chris, Rayment, Trevor, Myhra, Sverre
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container_title Ultramicroscopy
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creator Gibson, Christopher T.
Weeks, Brandon L.
Abell, Chris
Rayment, Trevor
Myhra, Sverre
description In this paper we present two simple, reliable and readily applicable methods for calibrating cantilevers and measuring the thickness of thin gold films. The spring constant calibration requires knowledge of the Young's modulus, density of the cantilever and resonant frequency. The thickness of thin gold layers was determined by measuring changes in the resonant frequency and Q-factor of beam shaped AFM cantilevers before and after coating. The techniques for measuring the spring constant and thin film thickness provide accuracy on the order of 10–15%.
doi_str_mv 10.1016/S0304-3991(03)00035-4
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subjects Atomic force microscopes
Cantilever
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Q-factor
Resonant frequency and spring constant
Scanning probe microscopes, components and techniques
title Calibration of AFM cantilever spring constants
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