Calibration of AFM cantilever spring constants
In this paper we present two simple, reliable and readily applicable methods for calibrating cantilevers and measuring the thickness of thin gold films. The spring constant calibration requires knowledge of the Young's modulus, density of the cantilever and resonant frequency. The thickness of...
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Veröffentlicht in: | Ultramicroscopy 2003-10, Vol.97 (1), p.113-118 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | In this paper we present two simple, reliable and readily applicable methods for calibrating cantilevers and measuring the thickness of thin gold films. The spring constant calibration requires knowledge of the Young's modulus, density of the cantilever and resonant frequency. The thickness of thin gold layers was determined by measuring changes in the resonant frequency and Q-factor of beam shaped AFM cantilevers before and after coating.
The techniques for measuring the spring constant and thin film thickness provide accuracy on the order of 10–15%. |
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ISSN: | 0304-3991 1879-2723 |
DOI: | 10.1016/S0304-3991(03)00035-4 |