Investigation of phase-growth kinetics during interaction of silicon single crystals and molybdenum thin films

Investigation of the phase-growth kinetics and identification of the phases formed as a result of reactive diffusion in the system of Si single crystals and Mo thin films, has been carried out by electrochemical anodic etching.

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Bibliographische Detailangaben
Veröffentlicht in:	Talanta (Oxford) 1977, Vol.24 (3), p.192-194
Hauptverfasser:	Fomin, B.I., Gershinskii, A.E., Cherepov, E.I.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Investigation of the phase-growth kinetics and identification of the phases formed as a result of reactive diffusion in the system of Si single crystals and Mo thin films, has been carried out by electrochemical anodic etching.
ISSN:	0039-9140 1873-3573
DOI:	10.1016/0039-9140(77)80091-X