Measured optical constants of copper from 10 nm to 35 nm

We use laser high-order harmonics and a polarization-ratio-reflectance technique to determine the optical constants of copper and oxidized copper in the wavelength range 10-35 nm. This measurement resolves previously conflicting data sets, where disagreement on optical constants of copper in the ext...

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Veröffentlicht in:Optics express 2009-12, Vol.17 (26), p.23873-23879
Hauptverfasser: Brimhall, Nicole, Herrick, Nicholas, Allred, David D, Turley, R Steven, Ware, Michael, Peatross, Justin
Format: Artikel
Sprache:eng
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Zusammenfassung:We use laser high-order harmonics and a polarization-ratio-reflectance technique to determine the optical constants of copper and oxidized copper in the wavelength range 10-35 nm. This measurement resolves previously conflicting data sets, where disagreement on optical constants of copper in the extreme ultraviolet most likely arises from inadvertent oxidation of samples before measurement.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.17.023873