Spatial frequency in speckle metrology

Speckle metrology, as applied to whole field displacement measurements, has been reviewed from the point of view of the relevant frequency domain. It is shown that spatial frequency defines sensitivity and resolution for both pointwise and whole field analysis. Theory and experimental results indica...

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Veröffentlicht in:Applied Optics 1990-08, Vol.29 (23), p.3392-3398
Hauptverfasser: TU, M, GIELISSE, P. J
Format: Artikel
Sprache:eng
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Zusammenfassung:Speckle metrology, as applied to whole field displacement measurements, has been reviewed from the point of view of the relevant frequency domain. It is shown that spatial frequency defines sensitivity and resolution for both pointwise and whole field analysis. Theory and experimental results indicate several ways in which sensitivity can be increased to values comparable with those obtained with moire interferometry. Grating objective speckle measurements have yielded displacement resolutions of
ISSN:0003-6935
1559-128X
1539-4522
DOI:10.1364/AO.29.003392