Fabrication of microlenses by laser chemical vapor deposition
A new laser-based method was developed for fabrication of microlenses on flat quartz plates. In this method, a CO(2) laser is used to heat a quartz surface and induce thermal reactions for source gases of SiH(4) and NO. Even as-grown silicon oxide deposits have the spherical thickness distribution r...
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Veröffentlicht in: | Applied Optics 1990-06, Vol.29 (18), p.2755-2759 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A new laser-based method was developed for fabrication of microlenses on flat quartz plates. In this method, a CO(2) laser is used to heat a quartz surface and induce thermal reactions for source gases of SiH(4) and NO. Even as-grown silicon oxide deposits have the spherical thickness distribution required for a lens at the center and this useful area can be further increased by wet etching. Microlenses were checked on a Fizeau interferometer for surface accuracy and aberrations. As a demonstration, a 14-microm thick microlens was used for collimating light from an optical fiber. |
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ISSN: | 0003-6935 1559-128X 1539-4522 |
DOI: | 10.1364/ao.29.002755 |