Fabrication of microlenses by laser chemical vapor deposition

A new laser-based method was developed for fabrication of microlenses on flat quartz plates. In this method, a CO(2) laser is used to heat a quartz surface and induce thermal reactions for source gases of SiH(4) and NO. Even as-grown silicon oxide deposits have the spherical thickness distribution r...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Applied Optics 1990-06, Vol.29 (18), p.2755-2759
Hauptverfasser: KUBO, M, HANABUSA, M
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A new laser-based method was developed for fabrication of microlenses on flat quartz plates. In this method, a CO(2) laser is used to heat a quartz surface and induce thermal reactions for source gases of SiH(4) and NO. Even as-grown silicon oxide deposits have the spherical thickness distribution required for a lens at the center and this useful area can be further increased by wet etching. Microlenses were checked on a Fizeau interferometer for surface accuracy and aberrations. As a demonstration, a 14-microm thick microlens was used for collimating light from an optical fiber.
ISSN:0003-6935
1559-128X
1539-4522
DOI:10.1364/ao.29.002755