Iterative algorithm for three flat test

Absolute planarity measurements by interferometry are classically made using three flats, compared two by two in the course of four or more tests. Data reduction is performed with various analytical methods. Here we present instead a data processing algorithm that converges to solution numerically b...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Optics express 2007-05, Vol.15 (11), p.6809-6816
Hauptverfasser: Vannoni, Maurizio, Molesini, Giuseppe
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Absolute planarity measurements by interferometry are classically made using three flats, compared two by two in the course of four or more tests. Data reduction is performed with various analytical methods. Here we present instead a data processing algorithm that converges to solution numerically by iteration. Examples are presented both on synthetic interferograms and on experimental data. High accuracy and versatility of the approach are demonstrated.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.15.006809