Characterization of optical coatings with backscattering spectrometry

We present three examples to illustrate the use of backscattering spectrometry to determine film stoichiometry, areal density, and impurity levels in optical coatings. Helium-ion beams with energies in the 1.5-5.0-MeV range were used to analyze (1) a magnesium fluoride coating, (2) a tungsten/silico...

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Veröffentlicht in:	Appl. Opt.; (United States) 1989-07, Vol.28 (14), p.2762-2764
Hauptverfasser:	LEAVITT, J. A, MCINTYRE, L. C. JR, ASHBAUGH, M. D, DEZFOULY-ARJOMANDY, B, ODER, J. G
Format:	Artikel
Sprache:	eng
Schlagworte:	656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-) ALKALINE EARTH METAL COMPOUNDS BACKSCATTERING BEAMS CHARGED PARTICLES CHEMICAL ANALYSIS COATINGS COLLISIONS CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY DIMENSIONS ELEMENTS ENERGY RANGE Exact sciences and technology FLUORIDES FLUORINE COMPOUNDS Fundamental areas of phenomenology (including applications) HALIDES HALOGEN COMPOUNDS HELIUM IONS ION BEAMS ION COLLISIONS IONS Lenses, prisms, and mirrors MAGNESIUM COMPOUNDS MAGNESIUM FLUORIDES MEMORY DEVICES METALS MEV RANGE MEV RANGE 01-10 MIRRORS Optical elements, devices, and systems Optics Physics SCATTERING SEMIMETALS SILICON STOICHIOMETRY THICKNESS THIN FILM STORAGE DEVICES TRANSITION ELEMENTS TUNGSTEN
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Zusammenfassung:	We present three examples to illustrate the use of backscattering spectrometry to determine film stoichiometry, areal density, and impurity levels in optical coatings. Helium-ion beams with energies in the 1.5-5.0-MeV range were used to analyze (1) a magnesium fluoride coating, (2) a tungsten/silicon multilayer soft x-ray mirror, and (3) a trilayer optical data storage film.
ISSN:	0003-6935 1559-128X 1539-4522
DOI:	10.1364/AO.28.002762