Viscoelastic spatial light modulator with active matrix addressing

Thin metallized viscoelastic layers, addressed by an active matrix of MOSFET(s) and used in a schlierenoptical light valve, are described. The time behavior and spatial frequency response of these incompressible deformable spatial light modulators are evaluated on the basis of a detailed theoretical analysis which takes into account the electrostatic field distribution, viscoelasticity of the elastomer material, and elasticity of the thin mirror electrode. Some of the theoretical predictions are compared to corresponding experimental results. The findings indicate satisfactory deformation properties of viscoelastic spatial light modulators for such applications as high resolution light valve projectors and optical information processing devices.