A variable-transmittance apodizing filter at 157 nm
A variable-transmittance apodizing filter has been designed and demonstrated at 157 nm. The Gaussian transmission function is created by flowing oxygen gas, which is absorptive below 185 nm, between the two spherical surfaces of meniscus lenses. By varying the oxygen partial pressure, the degree of...
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| Veröffentlicht in: | Optics express 2005-01, Vol.13 (2), p.648-653 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | A variable-transmittance apodizing filter has been designed and demonstrated at 157 nm. The Gaussian transmission function is created by flowing oxygen gas, which is absorptive below 185 nm, between the two spherical surfaces of meniscus lenses. By varying the oxygen partial pressure, the degree of apodization can be controlled. |
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| ISSN: | 1094-4087 1094-4087 |
| DOI: | 10.1364/OPEX.13.000648 |