Systematic design and fabrication of high-Q single-mode pulley-coupled planar silicon nitride microdisk resonators at visible wavelengths

High quality (Q approximately 6 x 10(5)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane wrap-around coupling waveguides to enable critical coupling to specific microdisk radial modes. Selective coupling to the first three radial modes w...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Optics express 2010-02, Vol.18 (3), p.2127-2136
Hauptverfasser: Shah Hosseini, Ehsan, Yegnanarayanan, Siva, Atabaki, Amir Hossein, Soltani, Mohammad, Adibi, Ali
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:High quality (Q approximately 6 x 10(5)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane wrap-around coupling waveguides to enable critical coupling to specific microdisk radial modes. Selective coupling to the first three radial modes with >20dB suppression of the other radial modes is achieved by controlling the wrap-around waveguide width. Advantages of such pulley-coupled microdisk resonators include single mode operation, ease of fabrication due to larger waveguide-resonator gaps, the possibility of resist reflow during the lithography phase to improve microdisk etched surface quality, and the ability to realize highly over-coupled microdisks suitable for low-loss delay lines and add-drop filters.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.18.002127