Interferometric laser rangefinder using a frequency modulated diode laser
A method for interferometrically measuring distances to rough surfaces with submillimeter resolution is described. The measuring range can be made as large as hundreds of millimeters. Owing to the inherent light sensitivity of the method described, the rangefinder can be used for 3-D profile measure...
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Veröffentlicht in: | Applied Optics 1987-11, Vol.26 (21), p.4545-4550 |
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Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | A method for interferometrically measuring distances to rough surfaces with submillimeter resolution is described. The measuring range can be made as large as hundreds of millimeters. Owing to the inherent light sensitivity of the method described, the rangefinder can be used for 3-D profile measurements on a wide variety of objects even in poor measuring conditions. |
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ISSN: | 0003-6935 1559-128X 1539-4522 |
DOI: | 10.1364/ao.26.004545 |