Nanowire transistors without junctions
All existing transistors are based on the use of semiconductor junctions formed by introducing dopant atoms into the semiconductor material. As the distance between junctions in modern devices drops below 10 nm, extraordinarily high doping concentration gradients become necessary. Because of the law...
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Veröffentlicht in: | Nature nanotechnology 2010-03, Vol.5 (3), p.225-229 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | All existing transistors are based on the use of semiconductor junctions formed by introducing dopant atoms into the semiconductor material. As the distance between junctions in modern devices drops below 10 nm, extraordinarily high doping concentration gradients become necessary. Because of the laws of diffusion and the statistical nature of the distribution of the doping atoms, such junctions represent an increasingly difficult fabrication challenge for the semiconductor industry. Here, we propose and demonstrate a new type of transistor in which there are no junctions and no doping concentration gradients. These devices have full CMOS functionality and are made using silicon nanowires. They have near-ideal subthreshold slope, extremely low leakage currents, and less degradation of mobility with gate voltage and temperature than classical transistors.
A nanowire transistor with full CMOS functionality has been fabricated without the use of junctions or doping concentration gradients. |
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ISSN: | 1748-3387 1748-3395 |
DOI: | 10.1038/nnano.2010.15 |