Spontaneous nanoscale corrugation of ion-eroded SiO2: the role of ion-irradiation-enhanced viscous flow
Grazing incidence x-ray scattering was used to determine the temperature and ion-energy dependence of nanoscale corrugations that form on an amorphous SiO2 surface eroded by Ar+ ions. The corrugation wavelength lambda* shows a nearly linear dependence on ion energy. Between room temperature and appr...
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Veröffentlicht in: | Physical review letters 2001-12, Vol.87 (24), p.246104-246104 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Grazing incidence x-ray scattering was used to determine the temperature and ion-energy dependence of nanoscale corrugations that form on an amorphous SiO2 surface eroded by Ar+ ions. The corrugation wavelength lambda* shows a nearly linear dependence on ion energy. Between room temperature and approximately 200 degrees C, lambda* depends weakly on temperature and above approximately 200 degrees C it shows an Arrhenius-like increase. Ion-assisted viscous relaxation in a thin surface layer is shown to be the dominant smoothing process during erosion; the rate of viscous smoothing scales as (lambda*)(-4). |
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ISSN: | 0031-9007 |
DOI: | 10.1103/PhysRevLett.87.246104 |