SMART – a program to measure SEM resolution and imaging performance

Summary It is important to be able to measure the parameters, such as spatial resolution, astigmastism, signal‐to‐noise ratio, and drift and instability, that characterize the performance of a scanning electron microscope. These quantities can be determined most reliably by a Fourier analysis of digital micrographs from the instrument, recorded under conditions of interest. A program designed to implement all of the necessary steps in an automated manner has been developed as a ‘macro’ for the popular, and freely available, NIH Image and SCION Image programs.