Fabrication of an improved gray-scale mask for refractive micro- and meso-optics

An experiment was performed on a new gray-scale mask material. The mask material is carbon based and has high attenuation in the deep ultraviolet spectral range. The experiment involves making a gray-scale mask for an axicon. Preliminary results show that gray-scale profiles of accurate transmittanc...

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Veröffentlicht in:Optics letters 2004-03, Vol.29 (5), p.457-458
Hauptverfasser: Zhou, Zhou, Lee, Sing H
Format: Artikel
Sprache:eng
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Zusammenfassung:An experiment was performed on a new gray-scale mask material. The mask material is carbon based and has high attenuation in the deep ultraviolet spectral range. The experiment involves making a gray-scale mask for an axicon. Preliminary results show that gray-scale profiles of accurate transmittance functions can be fabricated. Potentially, the capability at deep ultraviolet wavelengths will allow the fabrication of high-resolution components. The high-attenuation characteristic will allow the production of microscale and mesoscale optics of more phase levels.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.29.000457