Scanning Probe Lithography of Polymers: Tailoring Morphology and Functionality at the Nanometer Scale

This article reviews the patterning of the polymer via scanning probe lithography (SPL). Several different lithographies are characterized by the source of the patterned material, whether a mechanical, electrical, or thermal field is used, and whether the lithography modifies morphology, functionali...

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Veröffentlicht in:	Scanning 2008-03, Vol.30 (2), p.172-183
Hauptverfasser:	Lee, Woo-Kyung, Sheehan, Paul E.
Format:	Artikel
Sprache:	eng
Schlagworte:	atomic force microscopy polymers scanning probe lithography
Online-Zugang:	Volltext
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