Scanning Probe Lithography of Polymers: Tailoring Morphology and Functionality at the Nanometer Scale

This article reviews the patterning of the polymer via scanning probe lithography (SPL). Several different lithographies are characterized by the source of the patterned material, whether a mechanical, electrical, or thermal field is used, and whether the lithography modifies morphology, functionali...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Scanning 2008-03, Vol.30 (2), p.172-183
Hauptverfasser: Lee, Woo-Kyung, Sheehan, Paul E.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:This article reviews the patterning of the polymer via scanning probe lithography (SPL). Several different lithographies are characterized by the source of the patterned material, whether a mechanical, electrical, or thermal field is used, and whether the lithography modifies morphology, functionality, or both. The merits of the different strategies are discussed with respect to the fabrication goals. SCANNING 30: 000–000, 2008. © 2008 Wiley Periodicals, Inc.
ISSN:0161-0457
1932-8745
DOI:10.1002/sca.20084