Scanning Probe Lithography of Polymers: Tailoring Morphology and Functionality at the Nanometer Scale
This article reviews the patterning of the polymer via scanning probe lithography (SPL). Several different lithographies are characterized by the source of the patterned material, whether a mechanical, electrical, or thermal field is used, and whether the lithography modifies morphology, functionali...
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Veröffentlicht in: | Scanning 2008-03, Vol.30 (2), p.172-183 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | This article reviews the patterning of the polymer via scanning probe lithography (SPL). Several different lithographies are characterized by the source of the patterned material, whether a mechanical, electrical, or thermal field is used, and whether the lithography modifies morphology, functionality, or both. The merits of the different strategies are discussed with respect to the fabrication goals. SCANNING 30: 000–000, 2008. © 2008 Wiley Periodicals, Inc. |
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ISSN: | 0161-0457 1932-8745 |
DOI: | 10.1002/sca.20084 |