Resonant waveguide device with vertical gratings

Transmission resonant filters in a waveguide with vertical gratings have been realized in silicon on insulator wafers. Experimental studies of fabricated devices show a broad stopband of approximately 19 nm in the center of which exists a narrow transmission band of approximately 0.5 nm with a quality factor of approximately 3000. These resonant cavities are useful for laser cavities, switches, modulators, detectors, and tunable filters.