Optical Lithography with Printed Metal Mask and a Simple Superhydrophobic Surface

A nanolithographic optical patterning technique is presented. A metal pattern on a mold is transferred onto a photoresist on a substrate, then the resist with the printed metal mask is flood illuminated. The light passes through only the resist lenses that are formed in the transfer process. Focusin...

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Veröffentlicht in:	Small (Weinheim an der Bergstrasse, Germany) Germany), 2008-02, Vol.4 (2), p.182-185
Hauptverfasser:	Kim, Tae-il, Baek, Chang hoon, Suh, Kahp Y., Seo, Soon-min, Lee, Hong H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Hydrophobic and Hydrophilic Interactions Metals Microscopy, Electron, Scanning nanolenses nanolithography nanostructures Nanotechnology - methods Optics and Photonics Photography printing superhydrophobicity Surface Properties
Online-Zugang:	Volltext
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