Fabrication of Nanoscale Rings, Dots, and Rods by Combining Shadow Nanosphere Lithography and Annealed Polystyrene Nanosphere Masks

The application of shadow nanosphere lithography for the preparation of large‐area, two‐dimensional, metallic nanostructures of different shape is described. Through changing the mask morphology by temperature processing and varying the evaporation conditions, particles with morphologies such as rings, rods, and dots have been produced. This process allows outstanding control of the size and morphology of the particles. The efficient technique is shown to scale down the size of metallic nanoparticles from 200 to 30 nm, while preserving the original nanosphere spacing and order. The 150‐nm‐diameter Fe rings produced by this method show ferromagnetic behavior, which was predicted by theoretical simulation. All the experimental results were confirmed by computer simulations, which also showed the possibility of creating periodic arrays of any other geometrical shape. In any shape or form: Metallic nanoparticles with different shapes have been fabricated by deposition through a nanosphere mask. The morphology of the nanoparticles is controlled by annealing the mask to reduce the size of the apertures between the spheres, and by varying the evaporation conditions and moving the source. The SEM image shows Fe nanorings of outer diameter 150 nm and width 20–30 nm.